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Preliminary Technical Data
FEATURES
High Performance Accelerometer 70g, 250g And 500g Wideband Ranges Available 22kHz Resonant Frequency Structure High Linearity (0.2% of Full-scale) Low-Noise (4 mg/ Hz ) Sensitive Axis in the Plane of the Chip Frequency Response Down To DC Full Differential Signal Processing High Resistance to EMI/RFI Complete Electromechanical Self-test Output Ratiometric to Supply Velocity Preservation During Acceleration Input Overload Low-Power Consumption (2.5mA typ) 5mm LCC Hermetic Ceramic Package
High Performance Wide Bandwidth Accelerometer ADXL001
FUNCTIONAL BLOCK DIAGRAM
MOD
SELF-TEST
Figure 1. Functional Block Diagram
APPLICATIONS
Vibration Monitoring Shock Detection Sports Diagnostic Equipment Medical Instrumentation Industrial Monitoring
GENERAL DESCRIPTION
The ADXL001 is a major advance over previous generations of accelerometers - providing high performance and wide bandwidth. This part is ideal for industrial, medical, and military applications where wide bandwidth, small size, low power, and robust performance are essential. Utilizing our proprietary 5th Generation iMEMs process enables the ADXL001 to provide the desired dynamic range that extends from +/-70g to +/-500g in combination with 22kHz of bandwidth. The accelerometer output channel passes through a wide bandwidth differential to single ended converter, which allows access to the full mechanical performance of the sensor. The part can operate on voltage supplies from 3.3V to 5V. The ADXL001 also has a Self-Test (ST) pin that can be asserted to verify the full electromechanical signal chain for the accelerometer channel. The ADXL001 is available in industry standard 8 pin LCC and is rated to work over the extended industrial temperature range (-40 to +125C).
40.0 35.0 30.0 25.0
Response (dB)
20.0 15.0 10.0 5.0 0.0 -5.0 -10.0 1 10 100 1000 10000 100000 Frequency (Hz)
Figure 2. Sensor Frequency Response
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA
Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 (c)2008 Analog Devices, Inc. All rights reserved.
ADXL001 TABLE OF CONTENTS
Features .............................................................................................. 1 Applications....................................................................................... 1 GENERAL DESCRIPTION ............................................................ 1 Functional Block Diagram .............................................................. 1 Revision History ............................................................................... 2 Specifications..................................................................................... 3 Absolute Maximum Ratings............................................................ 5 ESD Caution.................................................................................. 5 Pin Configuration and Function Descriptions............................. 6 Theory of Operation ........................................................................ 7 Design Principles.......................................................................... 7 Mechanical Sensor........................................................................ 7
Preliminary Technical Data
Applications........................................................................................8 Application Circuit........................................................................8 Self-Test ..........................................................................................8 Acceleration Sensitive Axis ..........................................................8 Operating Voltages Other Than 5V............................................8 Layout, Grounding, and Bypassing Considerations .....................9 Clock Frequency Supply Response .............................................9 Power Supply Decoupling ............................................................9 Electromagnetic Interference ......................................................9 Outline Dimensions ....................................................................... 10 Ordering Guide............................................................................... 10
REVISION HISTORY
4/08-- Preliminary Technical Data Rev A
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 2 of 10
Preliminary Technical Data SPECIFICATIONS
Table 1. ADXL001 Specifications
( @ TA = -40C to +125C, VS = 3.3V 5% DC, Acceleration = 0g; unless otherwise noted) 70g Conditions SENSOR Nonlinearity Alignment error Package resonance Cross-axis sensitivity Resonant frequency Quality factor SENSITIVITY Full scale range Sensitivity Sensitivity OFFSET Zero-g output Zero-g output Noise Noise Noise density Frequency Response -3dB frequency -3dB frequency drift Self Test Delta V Delta V (cubic vs. Vs) Logic input high Logic input low Input resistance Output Amplifier Output swing Capacitive load PSRR/CFSR Power Supply (Vs) Functional Range Isupply Turn-on time 3.135 2.5 TBD 6 5 3.135 2.5 TBD 6 5 3.135 2.5 TBD 6 5 V mA ms DC-1MHz Iout=+/-100A 0.2 1000 0.5 Vs-0.2 0.2 1000 0.5 Vs-0.2 0.2 1000 0.5 Vs-0.2 V pF V/V Vs=3.3V Vs=3.3V To Ground 30 50 2.1 0.66 30 50 Vs=3.3V 400 10 2.1 0.66 30 50 TBD TBD 2.1 0.66 TBD TBD mV 22 2 22 2 22 2 kHz % 10Hz-400Hz 10Hz-400Hz 100 4 100 4 100 4 Ratiometric(1) Iout<=+/-100A Vs=3.3V, 100Hz Vs=5V, 100Hz Ratiometric(1) Vs=3.3V Vout-Vs/2 1.35 -90.9 1.65 1.95 90.9 TBD 1.65 TBD TBD 1.65 TBD V mV/V -70 16.0 24.2 Includes pkg. Alignment Die in package 0.2 1 130 2% 22 2.5 1 70 -250 4.30 6.5 2 0.2 1 130 2% 22 2.5 1 250 -500 2.15 3.26 2 0.2 1 130 2% 22 2.5 1 500 % g mV/g mV/g 2 % Min Typ Max Min 250g Typ Max Min 500g Typ Max Units
ADXL001
degree kHz % kHz
mg rms mg/rt Hz
mV/V^3 V V k
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 3 of 10
ADXL001
Preliminary Technical Data
TP RAMP-UP
tP
CRITICAL ZONE TL TO TP
TEMPERATURE (T)
TL
TSMAX TSMIN
tL
tS
PREHEAT
RAMP-DOWN
tPEAK
TIME (t)
Figure 3. Recommended Soldering Profile
Table 2. Recommended Soldering Profile
Profile Feature Average Ramp Rate (TL to TP) Preheat Minimum Temperature (TSMIN) Maximum Temperature (TSMAX) Time (TSMIN to TSMAX), ts TSMAX to TL Ramp-Up Rate Time Maintained Above Liquidous (tL) Liquidous Temperature (TL) Time (tL) Peak Temperature (TP) Time Within 5C of Actual Peak Temperature (tP) Ramp-Down Rate Time 25C to Peak Temperature (tPEAK) Sn63/Pb37 3C/s maximum 100C 150C 60 sec to 120 sec 3C/s 183C 60 sec to 150 sec 240C + 0C/-5C 10 sec to 30 sec 6C/s maximum 6 minute maximum Pb-Free 3C/s maximum 150C 200C 60 sec to 150 sec 3C/s 217C 60 sec to 150 sec 260C + 0C/-5C 20 sec to 40 sec 6C/s maximum 8 minute maximum
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 4 of 10
06896-022
Preliminary Technical Data ABSOLUTE MAXIMUM RATINGS
Table 3. Absolute Maximum Ratings
Parameter* Acceleration (Any Axis, Unpowered and Powered) Supply Voltage Vs Output Short Circuit Duration (Vout, to Ground) Storage Temperature Soldering Temperature Range (Soldering 10 sec) Operating Temperature Range Rating 4000 g -0.3 to 7.0V Indefinite -65C to 150C 245C -55C to 125C
ADXL001
ESD CAUTION
*Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. Drops onto hard surfaces can cause shocks of greater than 4000 g and can exceed the absolute maximum rating of the device. Exercise care during handling to avoid damage.
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 5 of 10
ADXL001 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
Preliminary Technical Data
Figure 4. Pin Configuration
Table 4. Pin Function Descriptions
Pin No. Mnemonic Description
1 2 3 4 5 6 7 8
DNC DNC COM ST DNC XOUT VDD VDD2
Do Not Connect Do Not Connect Common Self Test Control (Logic Input) Do Not Connect X Axis Acceleration Output 3.135 V to 6 V (Should Be Connected Physically To VDD2) 3.135 V to 6 V (Should Be Connected Physically To VDD)
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 6 of 10
Preliminary Technical Data THEORY OF OPERATION
DESIGN PRINCIPLES
The ADXL001 accelerometer provides a fully differential sensor structure and circuit path for excellent resistance to EMI/RFI interference. This latest generation SOIMEMS device takes advantage of mechanically coupled but electrically isolated differential sensing cells. This improves sensor performance and size as a single proof mass generates the fully differential signal. The sensor signal conditioning also uses electrical feedback with zero-force feedback for improved accuracy and stability. This force-feedback cancels out the electrostatic forces contributed by the sensor circuitry. Figure 5 is a simplified view of one of the differential sensor cell blocks. Each sensor block includes several differential capacitor unit cells. Each cell is composed of fixed plates attached to the device layer and movable plates attached to the sensor frame. Displacement of the sensor frame changes the differential capacitance. On-chip circuitry measures the capacitive change.
ADXL001
MECHANICAL SENSOR
The ADXL001 is built using the Analog Devices, Inc., SOIMEMS sensor process. The sensor device is micromachined in-plane in the SOI device layer. Trench isolation is used to electrically isolate, but mechanically couple, the differential sensing elements. Single-crystal silicon springs suspend the structure over the handle wafer and provide resistance against acceleration forces.
ANCHOR MOVABLE FRAME
PLATE CAPACITORS
ACCELERATION
UNIT SENSING CELL
FIXED PLATES
MOVING PLATE
UNIT FORCING CELL
ANCHOR
Figure 5. Simplified View of Sensor Under Acceleration
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 7 of 10
06896-019
ADXL001 APPLICATIONS
APPLICATION CIRCUIT
Figure 6 shows the standard application circuit for the ADXL001. Note that VDD and VDD2 should always be connected. The output is shown connected to a 1000 pF output capacitor for improved EMI performance and can be connected directly to the ADC input of a microcontroller. See the ADC specifications for proper antialiasing filtering, based on the user's sample rate.
Preliminary Technical Data
ACCELERATION SENSITIVE AXIS
The ADXL001 is an X-Axis acceleration and vibration-sensing device. It produces a positive-going output voltage for vibration toward its Pin 8 marking.
PIN 8
Figure 7. XOUT Increases with Acceleration in the +X-Axis Direction
OPERATING VOLTAGES OTHER THAN 5V
The ADXL001 is specified at VS = 3.3 V and VS = 5 V. Note that some performance parameters change as the voltage is varied. In particular, the Xout output exhibits ratiometric offset and sensitivity with supply. The output sensitivity (or scale factor) scales proportionally to the supply voltage. At VS = 3.3 V, output sensitivity is typically 16 mV/g. At VS = 5 V, sensitivity is nominally 24.2 mV/g. Xout zero g bias is nominally equal to VS/2 at all supply voltages. Self-test response in g is roughly proportional to the square of the supply voltage. However, when one factors ratiometricity of sensitivity in with supply voltage, the self-test response in voltage is roughly proportional to the cube of the supply voltage. For example, the self-test response for the ADXL001-70 at VS = 5 V is approximately 1.4 V. At VS = 3.3 V, the response is approximately 400 mV.
Figure 6. Application Circuit
SELF-TEST
The fixed fingers in the forcing cells are normally kept at the same potential as that of the movable frame. When the user activates the digital self-test input, the ADXL001 changes the voltage on the fixed fingers in these forcing cells on one side of the moving plate. This potential creates an attractive electrostatic force, causing the sensor to move towards those fixed fingers. The entire signal channel is active, so the sensor displacement causes a change in Xout. The ADXL001 self-test function verifies proper operation of the sensor, interface electronics, and accelerometer channel electronics. The ST pin should never be exposed to voltages greater than VS + 0.3 V. If this cannot be guaranteed due to the system design (for instance, if there are multiple supply voltages), then a low VF clamping diode between ST and VS is recommended.
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 8 of 10
06896-002
Preliminary Technical Data LAYOUT, GROUNDING, AND BYPASSING CONSIDERATIONS
CLOCK FREQUENCY SUPPLY RESPONSE
In any clocked system, power supply noise near the clock frequency may have consequences at other frequencies. An internal clock typically controls the sensor excitation and the signal demodulator for micromachined accelerometers. If the power supply contains high frequency spikes, they may be demodulated and interpreted as acceleration signals. A signal appears at the difference between the noise frequency and the demodulator frequency. If the power supply noise is 100 Hz away from the demodulator clock, there will be an output term at 100 Hz. If the power supply clock is at exactly the same frequency as the accelerometer clock, the term will appear as an offset. If the difference frequency is outside the signal bandwidth, the output filter attenuates it. However, both the power supply clock and the accelerometer clock may vary with time or temperature, which can cause the interference signal to appear in the output filter bandwidth. ADXL001 addresses this issue in two ways. First, the high clock frequency, 125 kHz for the output stage, eases the task of choosing a power supply clock frequency such that the difference between it and the accelerometer clock remains well outside the filter bandwidth. Second, ADXL001 has a fully differential signal path, including a pair of electrically isolated, mechanically coupled sensors. The differential sensors eliminate most of the power supply noise before it reaches the demodulator. Good high frequency supply bypassing, such as a ceramic capacitor close to the supply pins, also minimizes the amount of interference. Clock frequency supply response (CFSR) is the ratio of the response at the output to the noise on the power supply near the accelerometer clock frequency or its harmonics. A CFSR of 0.5 means that the signal at the output is half the amplitude of the supply noise. This is analogous to power supply rejection ratio (PSRR), except that the stimulus and the response are at different frequencies.
ADXL001
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 F capacitor, CDC, adequately decouples the accelerometer from noise on the power supply. However, in some cases, particularly where noise is present at the 1 MHz internal clock frequency (or any harmonic thereof), noise on the supply can cause interference on the ADXL001 output. If additional decoupling is needed, a 50 (or smaller) resistor or ferrite bead can be inserted in the supply line. Additionally, a larger bulk bypass capacitor (in the 1 F to 4.7 F range) can be added in parallel to CDC.
ELECTROMAGNETIC INTERFERENCE
The ADXL001 can be used in areas and applications with high amounts of EMI or with components susceptible to EMI emissions. The fully differential circuitry of the ADXL001 is designed to be robust to such interference. For improved EMI performance, especially in automotive applications, a 1000 pF output capacitor is recommended on the XOUT output.
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 9 of 10
ADXL001 OUTLINE DIMENSIONS
Preliminary Technical Data
Figure 8. Package Dimensions
ORDERING GUIDE
Table 5. Ordering Guide
Model Branding Package Gee Range Temperature Range
ADXL001-70 ADXL001-250 ADXL001-500
TBD TBD TBD
LCC-8 LCC-8 LCC-8
70g 250g 500g
-40C to 125C -40C to 125C -40C to 125C
(c)2008 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. PR07510-0-5/08(PrA)
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 10 of 10

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